| 摘要 |
PROBLEM TO BE SOLVED: To obtain a copper complex which has excellent thermal stability, hardly decomposes in a preserved state, has a long life, can give a higher film- forming rate, efficiently decomposes on a substrate to be highly evaporated, and has excellent adhesiveness to ground films. SOLUTION: The copper complex is represented by formula (1) or (2), in which 1,1,5,5,5-hexafluoropentane-2,4-dione and 2-methyl-1,3-butadiene which has two or more double bonds in the main chain and an alkyl group as a side chain are coordinated with a copper atom, respectively. A mixture is obtained by mixing the copper complex represented by formula (1) with the copper complex represented by formula (2). A copper thin film is produced from the copper complex or the mixture by an organic metal chemical vapor deposition method. COPYRIGHT: (C)2003,JPO
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