发明名称 |
Microelectronic system with integral cryocooler, and its fabrication and use |
摘要 |
A microelectronic system includes a substrate that is preferably silicon and a microelectronic device supported on the substrate. The microelectronic device may be a light sensor that include a readout integrated circuit formed in the silicon substrate, and a light detector supported on and electrically interconnected with the readout integrated circuit. A cryocooler formed in and integral with the substrate includes a gas inflow channel formed in the substrate, an expansion nozzle formed in the substrate and receiving a gas flow from the gas inflow channel, and a gas outflow channel that receives the gas flow from the outlet of the expansion nozzle. The gas inflow channel and the gas outflow channel may be countercurrent spirals.
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申请公布号 |
US6621071(B2) |
申请公布日期 |
2003.09.16 |
申请号 |
US20010952513 |
申请日期 |
2001.09.07 |
申请人 |
RAYTHEON CO. |
发明人 |
SOBEL LARRY D.;CAPARA JEFF |
分类号 |
F17C13/00;F25B9/02;H01L23/44;(IPC1-7):H01J7/24 |
主分类号 |
F17C13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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