| 摘要 |
A gas treatment apparatus is provided to prevent nitrogen oxides from generating additionally by using a plasma torch using nitrogen gas as an operating gas, and efficiently pyrolyze treatment target gases as compared with a conventional gas treatment apparatus, and a gas treatment method using the gas treatment apparatus is provided. A gas treatment apparatus(10) comprises a plasma pyrolyzer(12) which uses nitrogen gas as an operating gas(G) and includes a reactor(22) which surrounds atmospheric pressure plasma(P) and treatment target gas(F) that is supplied to the atmospheric pressure plasma, and in which the treatment target gas is pyrolyzed; and a cooling part(14) for cooling the exhaust gas to at least a temperature at which nitrogen oxides are not generated in a state that oxygen or water is not added to exhaust gas(R) comprising the treatment target gas and the operating gas exhausted from the plasma pyrolyzer after performing the pyrolysis. The cooling part includes a heat exchanger(72). The reactor has a double pipe structure comprising an outer pipe(46) and an inner pipe(48), the atmospheric pressure plasma is formed at an inner side of the inner pipe, a treatment target gas inlet(50) is formed on the outer pipe to introduce the treatment target gas into a space(S) between the outer pipe and the inner pipe, and a treatment target gas supply port is formed on the inner pipe to supply the treatment target gas passing through the space toward the atmospheric pressure plasma. Further, the treatment target gas is fluoride compound.
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