摘要 |
PROBLEM TO BE SOLVED: To obtain the equivalent effect to that when an electrode layer for external connection to a piezoelectric vibrator is formed in three faces while a using amount of an expensive electrode material is reduced by forming the electrode layer into two faces. SOLUTION: A fixing face for the piezoelectric vibrator 9 of a fixing substrate 16 has electric conductive properties. A segment electrode 24 electrically independent of an adjacent piezoelectric vibrator is formed at a leading end face of the piezoelectric vibrator 9 and a face not bonded to the fixing substrate 16. Moreover, a common electrode 26 is formed, which extends from the face not bonded to the fixing substrate 16 via a constant interval 25 from the segment electrode 24 to a rear end face of the piezoelectric vibrator 9 and has a region 26b with an increased thickness so that a region opposite to the fixing substrate 16 can be in touch with the fixing substrate 16. Furthermore, the thickened region 26b of the common electrode 26 forms an electric conductive relation with a surface of the fixing substrate 16 and is connected in parallel at the rear end face side by the fixing substrate 16. COPYRIGHT: (C)2003,JPO
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