发明名称 Manufacturing Process End Point Detection
摘要 A method for identifying a predetermined state of a manufacturing process by monitoring the process which involves, monitoring a plurality of variables that vary in value during the manufacturing process. The method also involves mapping as points in a hyperspace the values of each variable at a plurality of times, where the hyperspace has a number of dimensions equal to the number of variables and the number of points is equal to the plurality of times. The method also involves identifying that a manufacturing process has reached the predetermined state when one of the points reaches a closed volume in the hyperspace that is located within a predefined distance from a predefined location in the hyperspace.
申请公布号 US2008221720(A1) 申请公布日期 2008.09.11
申请号 US20070683218 申请日期 2007.03.07
申请人 MKS INSTRUMENTS, INC. 发明人 HENDLER LAWRENCE;RICHTER MATTHEW
分类号 G06F19/00 主分类号 G06F19/00
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