| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting method which can effectively eliminate the occurrence of flaws by glass scrap and can stabilize the quality of the rear surface of a glass plate, etc. SOLUTION: The method of cutting a glass substrate which cuts the glass substrate in the state of suction fixing the glass substrate to a stage comprises using the stage having a protective film on the front surface. COPYRIGHT: (C)2003,JPO
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