| 摘要 |
The invention concerns a microsystem module, in particular for use in microoptical systems, the module consisting of a body on the surface of which at least one functional area and support areas for attachment to adjacent microsystem components are provided. According to the invention, in order to provide a microsystem module of this type which can be connected to adjacent microstructure system components with an extremely good fit and in an exactly reproducible manner and preventing damage to the adjacent components and the sensitive functional areas of the microsystem module, the support areas are disposed in the region of outwardly projecting surface regions of the body which are set back relative to the support areas in the direction towards the interior of the body. The functional areas are disposed with very narrow tolerances in a dimensionally accurate manner relative to the support areas.
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