| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean booth to be used versatilely without a disassembly and reassembly work for a plurality of reaction furnaces of different types in a relatively small production facility. SOLUTION: Clean air is guided into/taken out from the clean booth. The clean booth comprises a booth body 20 with a framework assembled with frame members 4 to stand by itself and a sheet 3 supported by the framework, and a projecting booth 10 located beside the booth body 20 and connected to the booth body. The projecting booth 10 comprises a ceiling frame member 4a and a sheet 3a suspended from the ceiling frame member. The projecting booth 10 doesn't have a side frame member or a bottom frame member at least on the front end side of the projecting booth. COPYRIGHT: (C)2003,JPO
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