| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and apparatus for laser beam machining which can focus a laser beam with a high numerical aperture and, in different depths within a workpiece, can focus the laser beam with a constant numerical aperture. <P>SOLUTION: This laser beam machining apparatus includes: a laser beam source; an objective lens 11 for focusing a laser beam from the laser beam source; solid immersion lenses 12, 13, 14, 15, for focusing the laser beam focused in the objective lens 11, which are provided in a solid immersion lens revolver 16 and are different from one another in shape, size and refractive index. The solid immersion lenses 12, 13, 14, 15 can be replaced by using the solid immersion lens revolver 16. The solid immersion lenses 12, 13, 14, 15 have a refractive index of 1.43 to 2.03 and a diameter of 0.25 to 40 mm. <P>COPYRIGHT: (C)2003,JPO</p> |
