APPARATUS FOR INSPECTION OF THREE-DIMENSIONAL SHAPE AND METHOD FOR INSPECTION BY THE SAME

摘要

An apparatus for inspecting a three-dimensional shape and an inspection method using the same are provided to improve the accuracy of an image by using a display control unit for complementarily controlling the brightness with respect to the reflectivity of each pixel. An apparatus for inspecting a three-dimensional shape comprises a light source(200), a beam splitter(220), a projection unit(210), and an imaging unit(240). The beam splitter splits beam from the light source to the surface of an object(P) and a reflector(230). The projection unit projects the beam from the light source to the beam splitter. The imaging unit captures a beam pattern overlapped from the inspection surface and the reflector. Defects in the object are detected by measuring a three-dimensional shape of the object from the captured image. The projection unit includes a display control unit(211) controlling the brightness of the beam projected to the beam splitter according to pixel. The reflector includes a display control unit(231) complementarily controlling brightness with respect to the brightness of the projection unit.