发明名称 Working method for holding a work object by suction
摘要 Provided is a construction including a stage having a suction hole for sucking an electronic component and fixing the same in position and position regulating suction hole for sucking an electronic component when the electronic component is regulated in position, a position regulating pawl for positioning the electronic component on the stage and a position regulating suction force control section capable of controlling a position regulating suction force when the electronic component is regulated in position on the stage.
申请公布号 US6619535(B1) 申请公布日期 2003.09.16
申请号 US20010830508 申请日期 2001.04.27
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 IMANISHI MAKOTO;YONEZAWA TAKAHIRO;KANAYAMA SHINJI;KATANO RYOICHIRO;MAE TAKAHARU
分类号 H01L21/68;H01L21/683;(IPC1-7):B23K31/02;B23K1/06;B23K37/04 主分类号 H01L21/68
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