发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A nonvolatile semiconductor memory device has a plurality of memory strings each including a plurality of electrically rewritable memory cells serially connected. The memory string includes a columnar semiconductor portion extending in the vertical direction from a substrate, a first charge storage layer formed adjacent to the columnar semiconductor portion and configured to accumulate charge, a first block insulator formed adjacent to the first charge storage layer, and a first conductor formed adjacent to the first block insulator.
申请公布号 US2008315291(A1) 申请公布日期 2008.12.25
申请号 US20080140734 申请日期 2008.06.17
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KITO MASARU;AOCHI HIDEAKI;KATSUMATA RYOTA;KIDOH MASARU;TANAKA HIROYASU;FUKUZUMI YOSHIAKI;MATSUOKA YASUYUKI
分类号 H01L29/00;H01L21/31 主分类号 H01L29/00
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