发明名称 |
High-absorption wide-band pixel for bolometer arrays |
摘要 |
A microbolometer array has pixels with a thin platform of silicon dioxide having a metal absorber layer, and having a resonant gap with a substrate reflector. The pixel resistor of vanadium oxide has low total resistance with metal contacts on opposite edges.
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申请公布号 |
US6621083(B2) |
申请公布日期 |
2003.09.16 |
申请号 |
US20000751338 |
申请日期 |
2000.12.29 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
COLE BARRETT E. |
分类号 |
G01J1/02;G01J5/02;G01J5/20;G01J5/48;H01L27/14;H04N5/33;(IPC1-7):G01J5/02 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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