| 摘要 |
PURPOSE: A method for forming a liquid junction potential film of a micro pH sensor is provided to prevent a buffer solution filled in a reference electrode from evaporating, extend the life span of the micro pH sensor, and improve the stability of the micro pH sensor. CONSTITUTION: In a micro pH sensor(20) including a silicon wafer(21), a reference electrode(22) formed on the silicon wafer, a buffer solution(23) filled in an etching part(27) of the silicon wafer, an acryl(28) accumulated to surround the etching part, an epoxy(24) accumulated on the acryl, a method for forming a liquid junction potential film(25) of the micro pH sensor includes the steps of doping a through part(26) of the etching part of the silicon wafer in p type, fixing the silicon wafer at a partition of an electrolytic cell to contact one side of the silicon wafer to an HF solution and the other side of the silicon wafer to an electrolyte, and electrifying the positive pole and the negative pole in the solution, so that an electric field is generated and fine pores grow gradually in the silicon area doped in p type of the silicon wafer.
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