发明名称 METHOD FOR MANUFACTURING PROBE NEEDLE USING CYLINDRICAL ELECTRODE
摘要 PURPOSE: A method for manufacturing a probe needle is provided to be capable of easily processing a tip of the probe needle and easily controlling the length of the tip by using a cylindrical electrode. CONSTITUTION: A portion of a cylindrical electrode as a cathode is dipped in an etching solution, and the other portion of the cylindrical electrode is exposed. A tungsten wire as an anode is arranged at the center of the cylindrical electrode. Also, a portion of the tungsten wire is dipped in the etching solution and the other portion of the tungsten wire is exposed. The tungsten wire is then etched by using electro-chemical method.
申请公布号 KR20030071913(A) 申请公布日期 2003.09.13
申请号 KR20020011173 申请日期 2002.03.02
申请人 KANG, SUNG GOON 发明人 CHOI, JAE UNG;HWANG, GIL HO;KANG, SUNG GOON
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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