| 摘要 |
PURPOSE: A mass analyzer of a semiconductor ion implanter is provided to be capable of preventing pollutions of a controller caused by leak in a cooling water supply and exhaust line. CONSTITUTION: A mass analyzer comprises a coil part(30,32), a cooling water supply and exhaust line(36,40), a cation mobile path(34), a controller(44), a leak cover(46) and a leak detector(48). The coil part(30,32) are formed at the upper and lower portion of a cation mobile path(34). The cooling water supply and exhaust line(36,40) are formed at both sides of the coil part. The controller(44) is formed at the lower portion of the coil part. The leak cover(46) is covered to the controller. The leak detector(48) is formed on the leak cover.
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