| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating device having a cleaning function of a treatment chamber, its use method and a boat adapted for the treating device. SOLUTION: A treating device 100 contains a treating chamber 10 having a gas inlet 12 and a gas outlet 14. A cleaning plasma producing means is provided at an end portion on the side of the gas outlet 14 of the treating chamber 10. The plasma producing means can contain a coil 40 and a first high frequency power source 60. COPYRIGHT: (C)2003,JPO
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