| 摘要 |
PROBLEM TO BE SOLVED: To highly reliably perform high-accuracy exposure at the time of performing exposure by using a DMD (digital micro-mirror device). SOLUTION: An abnormality of a DMD (6) is detected from an output signal of a photosensor (8) by inclining a plurality of micro-mirrors of the DMD (6) in accordance with inspection pattern data by inputting the inspection pattern data to the DMD (6) as electric signals and receiving reflected light rays from the micro-mirrors by means of the photosensor (8). The photosensor (8) can be positioned on the routes of the reflected light rays from the micro-mirrors of the DMD (6), and can be retreated from the routes of the reflected light rays. Alternatively, a reflecting mirror can be positioned on the routes of the reflected light rays from the micro-mirrors so as to reflect the reflected light rays to the photosensor (8). COPYRIGHT: (C)2003,JPO
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