| 摘要 |
PROBLEM TO BE SOLVED: To allow boundary surfaces produced between a hole transport layer and a light emitting layer and between the light emitting layer and an electronic transport layer to deteriorate an organic EL element when the organic EL element is formed. SOLUTION: The material of the light emitting layer is evaporated in a first deposit source 62. In this case, the first deposit source 62 is moved from one end of a glass substrate to the other end. Accordingly, the light emitting layer is uniformly formed on the glass substrate 10. When the formation of the light emitting layer is completed, the material of the electronic transport layer is evaporated from a second deposit source 64. The second deposit source 64 uniformly forms the electronic transport layer also by moving in the same manner as the first deposit source 62. COPYRIGHT: (C)2003,JPO
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