| 摘要 |
PROBLEM TO BE SOLVED: To realize a charged-particle beam device and its signal processing method for enabling simultaneous image observation based on multiple detector signals per pixel and improving the efficiency of sample observation and analysis, and the ease of operation. SOLUTION: Two types of signals from detectors 7 and 8 are converted from n (=2) channel input signals to m (=1) channel by a first multiplexer 24. Regarding output signals from the multiplexer 24, pixels corresponding to each other within a frame are multiplied by a frame memory/frame multiplier 25. m-channel output signals from the frame memory/frame multiplier 25 are converted into n-channel signals again by a second multiplexer 26. n-channel signals are transmitted to a display frame memory 15. Image signals stored in the display frame memory 15 are read at an appropriate speed, converted into analog signals by a DA converter 16, and then supplied to a cathode ray tube 17. COPYRIGHT: (C)2003,JPO
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