| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a tuning fork vibrator wherein the occurrence of an oblique vibration mode is suppressed, and the efficiency of tuning fork vibration is higher. <P>SOLUTION: The method comprises processes of; smoothing respective XY planes of two quartz wafers 4, 5; making the respective XY planes hydrophilic to adsorb a hydroxy group thereto; overlapping X axes of the wafers 4, 5 such that they are directed oppositely, and heat treating the wafers; forming first and second protective films 6, 7 and first and second photoresists 8, 9 all corrosion-resistant to an etching solution for dissolving the wafers 4, 5; patterning the first and second protective films 6, 7 and the first and second photoresists 8, 9 on the respective wafers 4, 5 such that they are shifted by predetermined distances in the direction of a negative polarity on the X axis; and etching the respective wafers 4, 5 with the etching solution. <P>COPYRIGHT: (C)2003,JPO |
