发明名称 BOAT FOR HEAT TREATMENT AND VERTICAL TYPE HEAT TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To prevent the dropping, falling down, and damage of a single-legged boat and to improve the antiseismic property thereof by reliably connecting a leg and a rotating shaft of the boat. SOLUTION: The boat 16 for heat treatment comprises a main body 17 which supports a plurality of work pieces w in multiple stages in the vertical direction, and the single leg 18 connected to the rotating shaft 27 for rotating the main body 17 in the circumferential direction of the work piece w. The main body 17 and the leg 18 are integrally formed. A flange 19 is formed in the linkage of the leg 18 where the leg 18 is connected with the rotating shaft 27, and the flange 19 is formed with a hole 21 for tightening the flange 19 to the rotating shaft 27 by a screw 20. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003257958(A) 申请公布日期 2003.09.12
申请号 JP20020058262 申请日期 2002.03.05
申请人 TOKYO ELECTRON LTD 发明人 ASANO TAKAYASU;HONMA MANABU;SHIMAZU TOMOHISA
分类号 C23C16/458;H01L21/22;H01L21/31;H01L21/324;(IPC1-7):H01L21/31 主分类号 C23C16/458
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