| 摘要 |
PROBLEM TO BE SOLVED: To exactly hold planar objects, such as two disk substrates, superposed on each other across, for example, a UV curing composition held therebetween, to a plane state without exerting damage, such as flaws and foreign matter deposition, to the front surface. SOLUTION: The method for holding the plane comprises holding the planar objects on the front surface of a holding member 37 having the front surface of a plane shape and having through-holes 35 and 36 penetrating to a rear surface from the front surface by placing the planar objects on the front surface of the holding member 37 in a position where the through-holes 35 and 36 are partially covered, sucking the air from the rear surface side of the holding member 37 in this state and generating the air current flowing from the front surface side to the rear surface side of the holding member 37. COPYRIGHT: (C)2003,JPO
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