Measurement of the thickness of a thin film deposited on a tape with a surface that emits electrons in response to UV excitation, whereby the electron current intensity is measured and compared to calibration values

摘要

Method for continuous measurement of the thickness of a thin film deposited on a tape with a surface that emits electrons in response to UV excitation. Accordingly the tape is moved past a measurement head (10) that detects the emitted electrons. The measurement head is separated from the tape by a gaseous layer and held at a constant distance to it. The current intensity of the captured electrons is measured and compared with calibration values in order to determine the film thickness. The invention also relates to a corresponding measurement installation.