| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron energy analyzer capable of dispensing with rotation of an analyzer body and exhibiting enhanced angle resolution and a large drawing angle. SOLUTION: The electron energy analyzer is constituted by a cylindrical electron collecting lens, a conic deflection electrode, and a rotation type position sensitive electron multiplying plate. The conic deflection electrodes are constituted by two pieces of conic deflection electrodes, and an inlet slit and an outlet slit for an electron is opened to the inner conic deflection electrode. The rotation type position sensitive electron multiplying plate is housed in a shield box, and the shield box is rotated around a rotation shaft by rotations of a worm gear. A sample is ionized in a gas cell at a lower part. The emitted electron passes the cylindrical electron collecting lens and a space between two pieces of the conic deflection electrodes. The electron having specified energy is selected, and is detected by the position sensitive electron multiplying plate in the shield box after passing the outlet slit. COPYRIGHT: (C)2003,JPO
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