发明名称 WAFER HOUSING VESSEL
摘要 <p><P>PROBLEM TO BE SOLVED: To improve crashproof and vibration proof performances of a wafer box. <P>SOLUTION: A wafer box body 1 has a double structure comprising an inner box 2 and an outer box 3. A box lid 11 has a double structure comprising an inner lid 12 and an outer lid 13. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003258079(A) 申请公布日期 2003.09.12
申请号 JP20020051770 申请日期 2002.02.27
申请人 SEIKO EPSON CORP 发明人 KOBAYASHI TOSHIHIKO
分类号 B65D81/113;B65D85/86;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D81/113
代理机构 代理人
主权项
地址