发明名称 METHOD AND DEVICE FOR THE METERED DELIVERY OF LOW VOLUMETRIC FLOWS
摘要 The invention relates to a method for the metered delivery of low volumetric flows by the introduction of a gaseous stream into a tank containing a liquid and the displacement of the liquid through a liquid conduit. To improve said method, a partial gaseous stream (Q2) is diverted from a mass-flow controlled gaseous stream (Q1), at a pressure (P1) that is maintained at a constant level and that essentially corresponds to the gaseous pressure (P2) in the tank (4), and is guided into said tank to displace the liquid, the mass flow of the partial gaseous stream (2) being measured. A variation in the pressure (P1) allows a partial gaseous mass-flow to be set, whose volumetric flow, determined by taking into consideration the gas density (Q1), corresponds to the desired value for the liquid volumetric flow (Q3).
申请公布号 WO0244441(A3) 申请公布日期 2003.09.12
申请号 WO2001EP13074 申请日期 2001.11.10
申请人 AIXTRON AG;STRAUCH, GERD;JAKOB, MARKUS;LINDNER, JOHANNES 发明人 STRAUCH, GERD;JAKOB, MARKUS;LINDNER, JOHANNES
分类号 B05B9/04;C23C16/448;C23C16/52;G05D7/06;H01L21/31 主分类号 B05B9/04
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