| 发明名称 |
Method of making and apparatus having polishing pad with window |
| 摘要 |
A polishing layer of a polishing has a window member with a top surface positioned a predetermined distance below the polishing surface. A transparent layer can be positioned below the polishing layer and supporting the window member.
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| 申请公布号 |
US7547243(B2) |
申请公布日期 |
2009.06.16 |
| 申请号 |
US20070840499 |
申请日期 |
2007.08.17 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WISWESSER ANDREAS NORBERT;OSHANA RAMIEL;HUGHES KERRY F.;ROHDE JAY;HUO DAVID DATONG;BENVEGNU DOMINIC J. |
| 分类号 |
B24B49/12;B24B37/04;B24D13/14 |
主分类号 |
B24B49/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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