| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the efficiency of chemical-mechanical polishing without requiring a complicated or a large scale facility, and without changing stable polishing conditions in the chemical-mechanical polishing. <P>SOLUTION: This method for the chemical-mechanical polishing comprises a process (a) for heating the temperature of a polishing cloth up to a prescribed temperature by supplying temperature-adjusted liquid such as pure water which is pre-heated to a prescribed temperature, and a process (b) for polishing a workpiece by the chemical-mechanical polishing while supplying slurry over the polishing cloth. The chemical-mechanical polishing is progressed promptly. <P>COPYRIGHT: (C)2003,JPO |
