| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying apparatus and a method for cleaning an object which are capable of drying a wet cleaning object to be cleaned in a short period of time without the contamination of the object to be cleaned and energy loss. SOLUTION: In this drying apparatus for the object to be cleaned, a drying vessel 20 and a rinse vessel 30 are integrated, the upper part of the drying vessel 20 can be opened and thereby the object to be cleaned is accommodated or taken out of the upper side, and the apparatus is closed hermetically with the opening and closing of an opening/closing cover 21. The drying vessel 20 is provided with a mist guiding plate 22 to supply an organic solvent mist M of normal temperature to the object to be cleaned. The wet object to be cleaned is dried up with the organic solvent mist M radiated from the mist guiding plate 22. COPYRIGHT: (C)2003,JPO
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