DEVICE FOR DETECTING CHARGED PARTICLES AND PHOTONS

摘要

The invention relates to a device for detecting charged particles and photons by using secondary particles. Said device comprises: a substrate; a diamond film, which is applied to the substrate and serves as a detection layer for the particles to be detected; a secondary electron detector (channeltron) for detecting secondary electrons emitted from the diamond film as the charged particles and photons strike this film, and; a signal processing unit for the secondary electron detector.