| 摘要 |
<p>A stress sensor capable of irritating strain gauges (5) disposed on the surface of a substrate (3), wherein the strain gauges (5) are disposed on the surface of the substrate (3) having a plurality of piece-like parts (1) with free tips or semi-free tips and a support part for supporting the piece-like parts and irritated by a stress added to the piece-like parts (1) to vary the electric characteristics of the strain gauges (5) so as to detect the stress from a variation in the electric characteristics, for example, such a structure that the plurality of piece-like parts (1) are led from the peripheral edges of the frame-like substrate (3) toward the inside of a frame and the peripheral edges of the frame-like substrate (3) form support parts is adopted, whereby the stress sensor can be downsized by deflecting the substrate (3).</p> |
