| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a solar cell which is free from taking in impurities and generation of pin holes with high conversion efficiency, and can be easily manufactured, and to provide a manufacturing method thereof. <P>SOLUTION: In the multi-junction thin film solar cell which formed by laminating a plurality of pin-type cells, each cell consisting of laminated p-type semiconductor layer (a p-layer), an essential intrinsic i-type semiconductor layer (an i-layer), and an n-type semiconductor layer (an n-layer); at least either one layer of two layers (the n-layer or p-layer) constituting an interface between an upper cell in an incident side of light and a lower cell in an anti-incident side of light or one layer in the upper and lower pin cells is formed to be a low refraction index layer having a lower refraction index than the refraction index of the upper side semiconductor layer to at least either the one layer or one layer in the upper and lower pin cells. The low refractive index layer (5) is a semiconductor layer of silicon oxide. <P>COPYRIGHT: (C)2003,JPO</p> |
