发明名称 REFRACTIVE PROJECTION OBJECTIVE
摘要 <p>Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8 &lt;D1/D2&lt;1.1.</p>
申请公布号 WO2003075049(P1) 申请公布日期 2003.09.12
申请号 US2003006592 申请日期 2003.03.03
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