| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a thin film pattern not based on a resist. SOLUTION: An oil repellent - lipophilic patterning or a hydrophilic-lipophilic patterning is formed on a substrate surface, and minute liquid drops of a functional solution atomized by ultrasonic waves are introduced onto the surface together with a carrier gas, to adhere to only a lipophilic part or a hydrophilic part. Thus, a functional patterning film is formed. COPYRIGHT: (C)2003,JPO
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