| 摘要 |
PROBLEM TO BE SOLVED: To enable space-effective placement of an energy filter while maintaining symmetric property without restriction of an energy filter and controlling the height. SOLUTION: In the electron microscope with an energy filter between an objective lens and an image observing and recording system, optical axes of lens barrels 1 and 2 of the objective lens and the image recording system are placed in parallel, a filter surface S containing a line L, which links an outgoing part A of the objective lens and an incident part B of the image observing and recording system, is set, and an energy filter containing an incident deflection magnet, which deflects electron beams at the outgoing part A of the objective lens in the direction parallel to the filter surface S, and an outgoing deflection magnet, which deflects electron beams from the direction parallel to the filter surface S to the incident direction to the incident part B of the image observing and recording system, is placed in parallel with the filter face S. It enables space-effective placement of the energy filter while symmetric property can be maintained without restrictions of the energy filter, and the height can be controlled. COPYRIGHT: (C)2003,JPO
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