| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope with which the field-of-view of an observation image can be moved smoothly. SOLUTION: When observing an image with high magnification using a TV camera 15, a fluorescent screen 13 is released as shown by the dotted lines in figure 1. When a magnification variable knob 29 is operated to further increase an image magnification in the condition of inclined electron beams, a control means 23 does not generate a reset signal to reset current flowing in image shift coils 7 and 8 because a TV camera 18 is observing an image even though electron beams are being deflected by the image shift coils. Consequently, even if an image magnification is changed, the field-of-view of an object on the CRT cannot be missed, and the field-of-view can be smoothly moved. COPYRIGHT: (C)2003,JPO
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