| 摘要 |
PROBLEM TO BE SOLVED: To provide a simulation apparatus performing the simulation with regard to grating temperature regardless of grid intervals. SOLUTION: The simulation apparatus comprises an input section 11, a preparation section 12, a calculation section 13, and an output section 14. A virtual transient region 5 is set at a contact portion between a semiconductor and a metal. The thermal conductivity within the transient region 5 and the power consumption due to the contact resistance within the transient region 5 are calculated to solve the thermal conductance equation by using the calculation result. Therefore, even if the grid intervals which are set at both end surfaces of the transient region 5 change, the grating temperature becomes unvaried. Accordingly, the tolerance of the semiconductor device to heat can be predicted with a high degree of accuracy. COPYRIGHT: (C)2003,JPO
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