Deformable mirror and optical device using the same

摘要

A deformable mirror device is configured so that a deformable mirror of the type driven by electrostatic force is housed in a sealed package made of ceramic or plastic. The package is provided with a transparent window on the entrance and exit side of light. Light is incident on a reflecting surface of the deformable mirror through the window, and the light reflected at the reflecting surface emerges through the window.