Parameter adjuster

摘要

A chromosome using each of a plurality of parameters of a physical model of a semiconductor element as a gene is defined and the parameters are optimized using a genetic algorithm based on the characteristics measurement data of the semiconductor element fabricated by way of trial. In the selection processing of the genetic algorithm, a sum of a first evaluation value based on linear scale data and a second evaluation value based on logarithmic scale data is employed as the evaluation value of the chromosome.