| 摘要 |
To provide an X-ray monochromator capable of providing properly monochromated primary X-rays having a sufficiently high integrated intensity, the X-ray monochromator 4 for use in a X-ray fluorescence analysis for monochromating X-rays 2, emitted from an X-ray source 3, to provide primary X-rays 5 that are subsequently emitted towards a sample 1. The X-ray monochromator 4 is formed by depositing a plurality of layer pairs on a substrate 4c and each being made up of a reflecting layer 4a and a spacer layer 4b, with a plurality of multilayered films 4e including one or a plurality of layer pairs having a predetermined periodic length d, wherein the closer multilayered film 4e is to the substrate 4c, the smaller is set the above described predetermined periodic length d.
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