发明名称 Manufacture of holographic test lens by superposing plane-parallel light wave and divergent light wave to expose concentric interference patterns on substrate to which resist layer is applied
摘要 Grating structures are exposed in a photosensitive resist layer applied to a substrate (7) using an interferometric structure. By superposing a plane-parallel light wave (10a) and a convergent or divergent light wave (10b), concentric interference patterns are exposed on the substrate. The resist layer is developed photographically, to produce a substantially sinusoidal relief in the surface of the resist layer.
申请公布号 DE10209108(A1) 申请公布日期 2003.09.11
申请号 DE20021009108 申请日期 2002.03.01
申请人 CARL ZEISS SMT AG 发明人 DOERBAND, BERND
分类号 G02B5/32;G02B27/00;(IPC1-7):G03H1/00 主分类号 G02B5/32
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