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发明名称
Dosierrohr für Gasabgabe
摘要
申请公布号
DE60004290(D1)
申请公布日期
2003.09.11
申请号
DE20006004290
申请日期
2000.05.18
申请人
ASML US, INC.
发明人
INGLE, NITIN;YOUNG, LYDIA J.;STODDARD, D. NEIL;DESA, ANTHONY;YAO, JACK;HAMILTON, SHAWN
分类号
C23C16/455;G01F1/42;G05D7/01;H01J37/32;H01L21/205;(IPC1-7):G05D7/01
主分类号
C23C16/455
代理机构
代理人
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