发明名称 |
Methods of forming fuse box guard rings for integrated circuit devices |
摘要 |
The present invention provides methods of forming fuse box guard rings for integrated circuits and integrated circuit devices having the same. A fuse line is formed at a fuse portion of an integrated circuit device and a first insulating layer is formed on the fuse line. A guard ring pattern that encloses the fuse line is formed on the first insulating layer. A second insulating layer is formed on the guard ring pattern and the first insulating layer. The second insulating layer is partially etched to remove a portion of the second insulting layer in the fuse portion of the integrated circuit device enclosed by the guard ring pattern exposing a portion of the first insulating layer and to form a via hole in a peripheral circuit region of the integrated circuit device.
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申请公布号 |
US2003168715(A1) |
申请公布日期 |
2003.09.11 |
申请号 |
US20030364942 |
申请日期 |
2003.02.12 |
申请人 |
BAE MYOUNG-KWANG |
发明人 |
BAE MYOUNG-KWANG |
分类号 |
H01L23/52;H01L21/3205;H01L21/82;H01L21/8242;H01L23/525;H01L23/58;H01L27/105;H01L27/108;(IPC1-7):H01L21/82;H01L29/00 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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