| 发明名称 |
System and method for forming holes in substrates containing glass |
| 摘要 |
A system and method for micromachining substrates containing glass employing a UV laser beam generated by outputting a sub-1000 nm pulsed laser beam that is frequency converted by third harmonic generation to have a wavelength within the range of 285 nm to 333 nm. |
| 申请公布号 |
US2003168434(A1) |
申请公布日期 |
2003.09.11 |
| 申请号 |
US20020167472 |
申请日期 |
2002.06.13 |
| 申请人 |
ORBOTECH LTD |
发明人 |
GROSS ABRAHAM;KOTLER ZVI |
| 分类号 |
B23K26/06;B23K26/067;B23K26/08;B23K26/38;H05K1/03;H05K3/00;(IPC1-7):B23K26/14 |
主分类号 |
B23K26/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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