发明名称 Method of manufacturing semiconductor devices
摘要 A semiconductor device manufacturing method by which an organic resin film is formed on a semiconductor substrate in which integrated circuit elements and a wiring pattern have been formed and the entire circuit is sealed in a mold resin, includes a step of using an exposure mask having at least a pattern finer than the resolution limit of the organic resin to form a plurality of cavities on the surface of the organic resin film.
申请公布号 US2003171001(A1) 申请公布日期 2003.09.11
申请号 US20020094015 申请日期 2002.03.08
申请人 SHINOHARA MASAHIDE 发明人 SHINOHARA MASAHIDE
分类号 H01L21/3213;H01L21/027;H01L21/31;H01L21/3105;H01L21/311;H01L21/312;H01L23/29;H01L23/31;(IPC1-7):H01L21/31 主分类号 H01L21/3213
代理机构 代理人
主权项
地址