发明名称 Semiconductor integrated circuit including a dram and an analog circuit
摘要 A semiconductor device includes an interlayer insulation film formed on a substrate so as to cover first and second regions defined on the substrate, and a capacitor formed over the interlayer insulation film in the first region, wherein the interlayer insulation film includes, in the first region, a stepped part defined by a groove having a bottom surface lower in level than a surface of the interlayer insulation film in the second region.
申请公布号 US2003168686(A1) 申请公布日期 2003.09.11
申请号 US20030410300 申请日期 2003.04.10
申请人 FUJITSU LIMITED 发明人 HAYASHI MASAO;HAYASHI TADAAKI;EMA TAIJI;OHKAWA NARUMI
分类号 H01L27/06;H01L21/02;H01L21/8234;H01L21/8242;H01L27/108;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L27/06
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