发明名称 |
Triple damascene fuse |
摘要 |
Disclosed is a conductive fuse for a semiconductor device, comprising: a pair of contact portions integrally connected to a fusible portion by connecting portions; the contact portions thicker than the connecting portions and the connecting portions thicker than the fusible portion; a first dielectric under the connecting portions and the fusible portion and extending between the pair of contact portions; and a second dielectric between the first dielectric and the fusible portion, the second dielectric extending between the connecting portions and defining the length of the fusible portion.
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申请公布号 |
US2003168714(A1) |
申请公布日期 |
2003.09.11 |
申请号 |
US20020684000 |
申请日期 |
2002.03.11 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DAUBENSPECK TIMOTHY H.;MCDEVITT THOMAS L.;MOTSIFF WILLIAM T.;STAMPER ANTHONY K. |
分类号 |
H01L23/525;H01L23/532;(IPC1-7):H01L29/00 |
主分类号 |
H01L23/525 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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