SHAPE MEASUREMENT DEVICE, STRUCTURAL OBJECT PRODUCTION SYSTEM, SHAPE MEASUREMENT METHOD, STRUCTURAL OBJECT PRODUCTION METHOD, SHAPE MEASUREMENT PROGRAM, AND RECORDING MEDIUM

摘要

The purpose of the present invention is to more quickly and easily measure the shape of an object to be measured. A shape measurement device includes: a probe including a projection optical system that projects a line-shaped pattern onto a surface of the object to be measured or projects a spot pattern while scanning in at least a linear scanning range, and an image capturing device that detects an image of the pattern projected onto the object to be measured; a movement mechanism that rotates the object to be measured and the probe relative to each other so that the object to be measured rotates relative to the probe around a rotation axis and moves at least one of the probe and the object to be measured relatively in a direction that intersects with a rotation direction in which the object to be measured rotates; a measurement region setting unit that sets a measurement region of the object to be measured; and an actual measurement region setting unit that sets an actual measurement region including an actual measurement start position and an actual measurement end position on the basis of the measurement region set by the measurement region setting unit. The actual measurement region setting unit sets whichever of the actual measurement start position and the actual measurement end position is closer to a rotation axis center to be closer to the rotation axis than the measurement region, or sets whichever of the actual measurement start position and the actual measurement end position is located further outward in the radial direction to be further from the rotation axis than the measurement range.

主权项

1. A shape measurement device configured to measure a shape of an object to be measured, the device comprising:
a probe including: a projection optical system configured to project, onto a surface of the object to be measured, a line-shaped pattern, or a spot pattern while scanning in at least a linear scanning range; and an image capturing device configured to detect an image of the pattern projected onto the object to be measured; a movement mechanism configured to rotate the object to be measured and the probe relative to each other so that the object to be measured rotates relative to the probe around a rotation axis and moves at least one of the probe and the object to be measured relatively in a direction that intersects with a rotation direction of the relative rotation; a measurement region setting unit configured to set a measurement region of the object to be measured; and an actual measurement region setting unit configured to set an actual measurement region including an actual measurement start position and an actual measurement end position on the basis of the measurement region set by the measurement region setting unit, wherein the actual measurement region setting unit sets whichever of the actual measurement start position and the actual measurement end position is closer to a rotation axis center to be closer to the rotation axis than the measurement region, or the actual measurement region setting unit sets whichever of the actual measurement start position and the actual measurement end position is positioned further outward in a radial direction to be further from the rotation axis than the measurement range.