| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To execute both orientation measurement performed by irradiating the end face with an X-ray such as cut face measurement and orientation measurement performed by irradiating the peripheral face with the X-ray such as the orientation measurement of an orientation flat face by a common measuring device without requiring relocation of a measuring object. <P>SOLUTION: This device has an X-ray source F rotatable around anωaxis, for generating X-rays for irradiating a single crystal S, an X-ray detector 9 rotatable around theωaxis, and a rotational driving mechanisms 18, 19, 20 for rotationally moving the X-ray source F, the X-ray detector 9 and theωaxis collectively around aχaxis roughly perpendicular to theωaxis. The rotational driving mechanisms rotate the X-ray source F, the X-ray detector 9 and theωaxis collectively between the position where theωaxis becomes roughly perpendicular to the axis X<SB>0</SB>of the single crystal S and the position where theωaxis becomes roughly parallel to the axis X<SB>0</SB>. <P>COPYRIGHT: (C)2003,JPO</p> |
